ONTO INNOVATION INC.

Overview

Onto Innovation Inc. is a semiconductor capital-equipment company providing process-control technologies for semiconductor manufacturing and advanced packaging. Its portfolio includes metrology and inspection systems, lithography tools, and process-control software, with additional applications in specialty semiconductor and industrial markets.[1]+2 The company states that its mission is “to deliver comprehensive process solutions to the world’s most advanced manufacturers through collaboration and innovation.” [4]

The company supports customers through sales, service, and application offices across the United States and key Asian semiconductor markets, as well as Europe.[5] For fiscal 2025, ended January 3, 2026, it reported revenue of approximately $1.005 billion.[6][7] Its investor-relations overview lists 1,900 employees worldwide; the figure is not dated on the page.[8] [1]+9

Products & services

Onto Innovation’s products include metrology systems that measure critical dimensions, thin films, stress, and electrical properties. Atlas systems provide optical critical-dimension (OCD), thin-film, and wafer-stress metrology; IMPULSE systems integrate with wafer-processing equipment for near-real-time OCD and thin-film measurements. FAaST offers non-contact electrical metrology, while CnCV characterizes wide-bandgap materials at wafer level without requiring test-device fabrication.[9]+2

Inspection and analysis products include F30, NSX, Firefly, and Dragonfly G3 macro-inspection systems, with capabilities such as high-speed inspection, recipe creation, tool-to-tool correlation, and multiple inspection resolutions. Discover analyzes and classifies inspection data. MetaPULSE/Echo measure up to six opaque-film layers; NanoSpec measures thin films; and MBIR provides in-line infrared reflectometry for high-aspect-ratio structures, films, and epitaxial structures. The Dragonfly G5 product page also describes submicron defect detection, high-speed infrared imaging, and 3D bump-height metrology.[12]+4

For advanced packaging, JetStep X500 is a lithography system designed for rectangular panels, with selectable wavelengths, high-fidelity imaging, autofocus, and reticle management. Software products include AI Diffract for model-based analysis of critical dimensions, thickness, and optical properties, and SpectraProbe for model-less fitting used in excursion detection and control; broader software offerings include run-to-run control, fault detection and classification, automation, and yield management. Services include parts, maintenance contracts, system upgrades, and time-and-material repairs and support.[17]+5

In FY2025, systems and software represented 84% of revenue, parts 8%, and services 8%; the cited revenue mix does not break out individual product families.[23] [9]+18

Geographic presence

For the fiscal year ended January 3, 2026, Onto Innovation reported revenue across Asia, the United States and Europe. By customer geography, Taiwan contributed $318.8 million (32% of revenue), South Korea $279.4 million (28%), the United States $121.1 million (12%), Japan $95.4 million (10%), China $70.7 million (7%), Southeast Asia $64.3 million (6%), and Europe $55.6 million (5%). These figures reflect customer geography.[24]

The company reports local direct sales, service and application support through offices in the United States, South Korea, Japan, Taiwan, Malaysia, China, Vietnam, Singapore and Europe, supplemented by selected dealers and sales representatives in other locations. Its manufacturing operations include sites in Milpitas, California; Tucson, Arizona; Wilmington, Massachusetts; and Bloomington, Minnesota, as well as contract manufacturers worldwide.[24]

Onto Innovation’s leased facilities support corporate, engineering, manufacturing, sales and service activities in the United States and nine other countries: China, Germany, Japan, the Netherlands, South Korea, Singapore, Taiwan, Malaysia and Vietnam. The filing does not provide a geographic breakdown of employees.[24] [25]+8

Business segments

Onto Innovation reports one operating and reportable segment; it does not disclose metrology, inspection, lithography, or software as separate reportable segments. Its single segment covers the design, development, manufacture, and support of process-control systems, including metrology, defect inspection, lithography, and data-analysis software for semiconductor manufacturing and advanced packaging. These are product areas within one segment, not separate segments.[32]+2 The company’s Q2 2026 filing reaffirmed its single-segment reporting.[34]

For FY2025, revenue was $1,005.3 million. By revenue source—not by reportable segment—systems and software contributed $847.8 million (about 84%), parts $84.2 million (about 8%), and services $73.2 million (about 7%). The company does not disclose revenue percentages for its individual product areas.[23] [32]+4

Company history

Onto Innovation’s history reflects the combination of two predecessor businesses: Nanometrics, whose roots date to 1975, and Rudolph Technologies, with roots dating to 1940. Nanometrics introduced its NanoSpec/AFT wafer film-thickness system in 1977, became publicly traded on Nasdaq in 1984, and acquired Accent Optical Technologies in 2006.[35]

In June 2019, Nanometrics and Rudolph Technologies agreed to an all-stock merger of equals and named Rudolph CEO Michael Plisinski to lead the combined company.[36][37] The merger closed on October 25, 2019: Nanometrics was renamed Onto Innovation Inc., Rudolph became its wholly owned subsidiary, and the combined company began trading as ONTO.[38]+2

Onto expanded its capabilities through acquisitions, including Inspectrology in 2021, which added overlay metrology for compound-semiconductor processes.[41] In October 2024, it acquired Lumina Instruments’ optical defect-inspection technology and Kulicke & Soffa’s lithography business.[42][43] In 2025, Onto agreed to acquire Semilab International’s materials-analysis business and completed the acquisition of Semilab USA on November 17.[44][45] [38]+10

Sources

• ONTO INNOVATION INC. — Full financial report (2025 Y)
  28 citations

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• ontoinnovation.com[4]
• investors.ontoinnovation.com[8]
• ontoinnovation.com[16]
• ontoinnovation.com[22]
• www.sec.gov[24]
• ONTO INNOVATION INC. — Full financial report (2026 Q 2)[34][44]
• investors.ontoinnovation.com[35]
• ONTO INNOVATION INC. — Full financial report (2019 Y)
  4 citations

  [36][38][39][40]
• investors.ontoinnovation.com[37]
• investors.ontoinnovation.com[41]
• ONTO INNOVATION INC. — Full financial report (2024 Y)[42]
• investors.ontoinnovation.com[43]
• investors.ontoinnovation.com[45]