# AXCELIS TECHNOLOGIES INC

Summary updated: 2026-10-04T09:51:25.779499Z
Canonical: https://finbar.com/research/companies/axcelis-technologies-inc

## Overview

Axcelis Technologies, Inc. operates in the semiconductor equipment industry, specializing in ion implantation systems used to modify silicon wafers during semiconductor manufacturing. Its product portfolio includes high-current, medium-current and high-energy implanters, including the Purion family, as well as related services. The Purion Power Series supports power-device production on silicon-carbide wafers, with applications that include electric vehicles and industrial uses. [1](https://app.finbar.com/go?id=P33373030)[2](https://app.finbar.com/go?id=P82948874)[3](https://app.finbar.com/go?id=P32401751)[4](https://app.finbar.com/go?id=P116687516)[5](https://app.finbar.com/go?id=P44024808)

For 2025, Axcelis reported revenue of $839.0 million, comprising product revenue and services revenue. [6](https://app.finbar.com/go?id=T6188946) The company is headquartered in Beverly, Massachusetts, and has manufacturing and research operations there, an Asia Operations Center in South Korea, and sales, service and other locations across the United States, Asia and Europe. [7](https://app.finbar.com/go?id=P95251369)[8](https://app.finbar.com/go?id=P7474479)[9](https://app.finbar.com/go?id=P121647660) Axcelis describes its power-device products as supporting vehicle electrification and climate-related efforts. [10](https://app.finbar.com/go?id=P98509383)
[1](https://app.finbar.com/go?id=P33373030)[2](https://app.finbar.com/go?id=P82948874)[3](https://app.finbar.com/go?id=P32401751)[4](https://app.finbar.com/go?id=P116687516)[5](https://app.finbar.com/go?id=P44024808)[6](https://app.finbar.com/go?id=T6188946)[7](https://app.finbar.com/go?id=P95251369)[8](https://app.finbar.com/go?id=P7474479)[9](https://app.finbar.com/go?id=P121647660)[10](https://app.finbar.com/go?id=P98509383)

## Products & services

Axcelis’s product portfolio centers on ion-implantation systems, including Purion high-current models (Purion H, Dragon and H200), medium-current Purion M Si and SiC, and high-energy Purion XE/EXE. The company also lists GSD/E2 Ovation spot-beam high-current systems and batch high-energy GSD/HE Ovation and GSD/VHE Ovation systems. The XE/EXE Power Series is designed for power-device aluminum implantation and supports 150 mm SiC or 200 mm thin-silicon wafers. The batch GSD/HE uses a 10-stage LINAC with energy up to 3 MeV; GSD/VHE uses a 14-stage LINAC with energy up to 4.9 MeV. Axcelis’s product pages specify Purion XE up to 4.5 MeV, Purion EXE up to 5.25 MeV, and Purion H200 at 10–230 keV. [2](https://app.finbar.com/go?id=P82948874)[11](https://app.finbar.com/go?id=T12490409)[12](https://app.finbar.com/go?id=T6597896)[13](https://www.axcelis.com/products/purion-xe-series-high-energy-ion-implantation/)[14](https://www.axcelis.com/products/purion-h-high-current-ion-implantation/) The company also identifies curing and thermal-processing systems. [15](https://app.finbar.com/go?id=P19065422)

Services and aftermarket offerings include spare parts, equipment upgrades, used equipment, maintenance, technical support and customer training. [15](https://app.finbar.com/go?id=P19065422)[16](https://app.finbar.com/go?id=P150191263)[17](https://www.axcelis.com/ion-implantation-equipment-support/)[18](https://www.axcelis.com/ion-implantation-equipment-support/technical-training/) In the second quarter of 2026, product revenue was $200.488 million, or 93.2% of total revenue, while services revenue was $14.687 million, or 6.8%; these figures distinguish product from service revenue, not revenue by named product family. [19](https://app.finbar.com/go?id=T17190080)
[2](https://app.finbar.com/go?id=P82948874)[11](https://app.finbar.com/go?id=T12490409)[12](https://app.finbar.com/go?id=T6597896)[15](https://app.finbar.com/go?id=P19065422)[16](https://app.finbar.com/go?id=P150191263)[19](https://app.finbar.com/go?id=T17190080)[13](https://www.axcelis.com/products/purion-xe-series-high-energy-ion-implantation/)[14](https://www.axcelis.com/products/purion-h-high-current-ion-implantation/)[17](https://www.axcelis.com/ion-implantation-equipment-support/)[18](https://www.axcelis.com/ion-implantation-equipment-support/technical-training/)

## Geographic presence

Axcelis Technologies’ principal operating site is in Beverly, Massachusetts, which houses its headquarters and manufacturing, research and development, customer-support, process-development and training functions. It also operates a logistics and flex-manufacturing center in Beverly and an Asia Operations Center in South Korea, used principally for manufacturing. At year-end 2025, the company reported 48 other leased properties—10 in the United States and the remainder in Asia and Europe—supporting sales, service and warehousing. Its listed sales-office locations include the United States, Taiwan, South Korea, China, Singapore, Japan, Germany and Italy. [7](https://app.finbar.com/go?id=P95251369)[20](https://app.finbar.com/go?id=P122277252)[8](https://app.finbar.com/go?id=P7474479)[9](https://app.finbar.com/go?id=P121647660)

For full-year 2025, revenue by the location of the operation recording the sale was $482.6 million in the United States (57.5%), $306.5 million in Asia Pacific (36.5%) and $50.0 million in Europe (6.0%). Separately, international revenue—including exports from U.S. operations—was $702.0 million, or 83.7% of total revenue. [21](https://app.finbar.com/go?id=T9673816)[22](https://app.finbar.com/go?id=P38768105) In the six months ended June 30, 2026, reported revenue was $322.3 million in Asia Pacific, $55.7 million in Europe and $36.2 million in North America. [23](https://app.finbar.com/go?id=T17190092)
[7](https://app.finbar.com/go?id=P95251369)[20](https://app.finbar.com/go?id=P122277252)[8](https://app.finbar.com/go?id=P7474479)[9](https://app.finbar.com/go?id=P121647660)[21](https://app.finbar.com/go?id=T9673816)[21](https://app.finbar.com/go?id=T9673816)[21](https://app.finbar.com/go?id=T9673816)[22](https://app.finbar.com/go?id=P38768105)[23](https://app.finbar.com/go?id=T17190092)[23](https://app.finbar.com/go?id=T17190092)[23](https://app.finbar.com/go?id=T17190092)

## Business segments

Axcelis Technologies Inc. reports one operating segment, rather than multiple business segments. Its single segment focuses on ion-implantation equipment and related products and services used in semiconductor manufacturing, including transistor fabrication and modification of silicon and silicon-carbide materials. The portfolio includes high-current and high-energy implant systems, including systems for power-device applications. The sole segment represented 100% of 2025 consolidated revenue, or $839.0 million. [24](https://app.finbar.com/go?id=T10436387)[1](https://app.finbar.com/go?id=P33373030)[25](https://app.finbar.com/go?id=T3701400)[4](https://app.finbar.com/go?id=P116687516)[26](https://www.sec.gov/Archives/edgar/data/1113232/000110465926020461/acls-20251231x10k.htm)

Axcelis also discloses revenue categories within that single segment, not as separate business segments: 2025 product revenue was $792.0 million (approximately 94.4% of total revenue), while services revenue was $47.0 million (approximately 5.6%). Product revenue includes new systems, spare parts, upgrades, and used systems. [6](https://app.finbar.com/go?id=T6188946)[27](https://app.finbar.com/go?id=P84842128)
[24](https://app.finbar.com/go?id=T10436387)[1](https://app.finbar.com/go?id=P33373030)[25](https://app.finbar.com/go?id=T3701400)[4](https://app.finbar.com/go?id=P116687516)[6](https://app.finbar.com/go?id=T6188946)[27](https://app.finbar.com/go?id=P84842128)[26](https://www.sec.gov/Archives/edgar/data/1113232/000110465926020461/acls-20251231x10k.htm)

## Company history

Axcelis traces its operating roots to 1978, when Nova Associates began developing ion-implantation equipment; Eaton acquired Nova in 1981. The present company was incorporated in 1995 and became independent from Eaton in 2000, when Eaton completed the distribution of its remaining ownership after Axcelis’s public offering. [28](https://www.axcelis.com/about_us_timeline/1978/)[29](https://app.finbar.com/go?id=P42816192)[30](https://www.axcelis.com/about_us_timeline/1981/)[31](https://www.sec.gov/Archives/edgar/data/1113232/000111323201500003/form10k.htm)

In 2002, Axcelis acquired Tritek International’s semiconductor-equipment division, expanding its sales and service presence in China; in 2009, it sold its interest in the SEN joint venture to Sumitomo Heavy Industries. In 2012, the company agreed to transfer its dry-strip technology to Lam Research and focus on ion implantation, while launching its Purion implanter platform. Mary Puma became CEO in 2002 and was succeeded by Russell Low in 2023. [32](https://www.eetimes.com/axcelis-buys-china-chip-equipment-distributor-tritek/)[33](https://investor.axcelis.com/news-releases/news-release-details/axcelis-technologies-completes-sale-its-interest-joint-venture)[34](https://investor.lamresearch.com/2012-12-04-Axcelis-Technologies-and-Lam-Research-Enter-Strategic-Collaboration-Agreement-on-Ion-Implant%2C-Dry-Strip%2C-and-Etch)[35](https://www.axcelis.com/about_us_timeline/1986-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2/)[36](https://investor.axcelis.com/news-releases/news-release-details/mary-puma-elected-chief-executive-officer-and-mike-luttati-chief)[37](https://investor.axcelis.com/news-releases/news-release-details/axcelis-technologies-announces-ceo-succession/)
[29](https://app.finbar.com/go?id=P42816192)[28](https://www.axcelis.com/about_us_timeline/1978/)[30](https://www.axcelis.com/about_us_timeline/1981/)[31](https://www.sec.gov/Archives/edgar/data/1113232/000111323201500003/form10k.htm)[32](https://www.eetimes.com/axcelis-buys-china-chip-equipment-distributor-tritek/)[33](https://investor.axcelis.com/news-releases/news-release-details/axcelis-technologies-completes-sale-its-interest-joint-venture)[34](https://investor.lamresearch.com/2012-12-04-Axcelis-Technologies-and-Lam-Research-Enter-Strategic-Collaboration-Agreement-on-Ion-Implant%2C-Dry-Strip%2C-and-Etch)[35](https://www.axcelis.com/about_us_timeline/1986-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2/)[36](https://investor.axcelis.com/news-releases/news-release-details/mary-puma-elected-chief-executive-officer-and-mike-luttati-chief)[37](https://investor.axcelis.com/news-releases/news-release-details/axcelis-technologies-announces-ceo-succession/)

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1. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P33373030)
2. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P82948874)
3. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P32401751)
4. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P116687516)
5. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P44024808)
6. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=T6188946)
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9. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P121647660)
10. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P98509383)
11. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=T12490409)
12. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=T6597896)
13. [www.axcelis.com](https://www.axcelis.com/products/purion-xe-series-high-energy-ion-implantation/)
14. [www.axcelis.com](https://www.axcelis.com/products/purion-h-high-current-ion-implantation/)
15. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P19065422)
16. [AXCELIS TECHNOLOGIES INC — Full financial report (2026 Q 2)](https://app.finbar.com/go?id=P150191263)
17. [www.axcelis.com](https://www.axcelis.com/ion-implantation-equipment-support/)
18. [www.axcelis.com](https://www.axcelis.com/ion-implantation-equipment-support/technical-training/)
19. [AXCELIS TECHNOLOGIES INC — Full financial report (2026 Q 2)](https://app.finbar.com/go?id=T17190080)
20. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P122277252)
21. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=T9673816)
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28. [www.axcelis.com](https://www.axcelis.com/about_us_timeline/1978/)
29. [AXCELIS TECHNOLOGIES INC — Full financial report (2025 Y)](https://app.finbar.com/go?id=P42816192)
30. [www.axcelis.com](https://www.axcelis.com/about_us_timeline/1981/)
31. [www.sec.gov](https://www.sec.gov/Archives/edgar/data/1113232/000111323201500003/form10k.htm)
32. [www.eetimes.com](https://www.eetimes.com/axcelis-buys-china-chip-equipment-distributor-tritek/)
33. [investor.axcelis.com](https://investor.axcelis.com/news-releases/news-release-details/axcelis-technologies-completes-sale-its-interest-joint-venture)
34. [investor.lamresearch.com](https://investor.lamresearch.com/2012-12-04-Axcelis-Technologies-and-Lam-Research-Enter-Strategic-Collaboration-Agreement-on-Ion-Implant%2C-Dry-Strip%2C-and-Etch)
35. [www.axcelis.com](https://www.axcelis.com/about_us_timeline/1986-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2-2/)
36. [investor.axcelis.com](https://investor.axcelis.com/news-releases/news-release-details/mary-puma-elected-chief-executive-officer-and-mike-luttati-chief)
37. [investor.axcelis.com](https://investor.axcelis.com/news-releases/news-release-details/axcelis-technologies-announces-ceo-succession/)

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